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Growth Kinetics and Initial Stage Growth during Ti Plasma Enhanced-Atomic Layer Deposition
- Title
- Growth Kinetics and Initial Stage Growth during Ti Plasma Enhanced-Atomic Layer Deposition
- Authors
- 김형준
- Date Issued
- 2001-08-01
- Article Type
- Conference
- Citation
- American Vacuum Society, 2001-08-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg