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산소 플라즈마 중간처리에 의한 SiO2/Si 계면 특성 개선
- Title
- 산소 플라즈마 중간처리에 의한 SiO2/Si 계면 특성 개선
- Authors
- 이시우
- Date Issued
- 2000-10-27
- Publisher
- 대한금속재료학회
- Article Type
- Conference
- Citation
- 대한금속재료학회, page. 237, 2000-10-27
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