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Cu MOCVD Process using hfacCu(I)DMB(3,3-dimethyl-1-butene) Liquid Precusor
- Title
- Cu MOCVD Process using hfacCu(I)DMB(3,3-dimethyl-1-butene) Liquid Precusor
- Authors
- 이시우
- Date Issued
- 2000-01-26
- Publisher
- 한국 반도체 학술대회
- Article Type
- Conference
- Citation
- 한국반도체학술대회, page. 91, 2000-01-26
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