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Comparison of Bi(TMHD)3 and Bi(Ph)3 Precursor as a Bi Source for the Depositon of SrBi2Ta2O9 Films
- Title
- Comparison of Bi(TMHD)3 and Bi(Ph)3 Precursor as a Bi Source for the Depositon of SrBi2Ta2O9 Films
- Authors
- 이시우
- Date Issued
- 2000-01-26
- Publisher
- 한국반도체 학술대회
- Article Type
- Conference
- Citation
- 한국반도체학술대회, page. 551, 2000-01-26
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