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Design and fabrication of scratch drive actuator for optical application using MEMS technology

Title
Design and fabrication of scratch drive actuator for optical application using MEMS technology
Authors
권오대
Date Issued
1999-11-26
Publisher
IEEK
URI
https://oasis.postech.ac.kr/handle/2014.oak/77742
Article Type
Conference
Citation
IEEK Transaction, 1999-11-26
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