Full metadata record
DC Field | Value | Language |
dc.contributor.author | 김재현 | en_US |
dc.date.accessioned | 2015-02-25T12:36:02Z | - |
dc.date.available | 2015-02-25T12:36:02Z | - |
dc.date.issued | 2006 | en_US |
dc.identifier.other | OAK-2015-05414 | en_US |
dc.identifier.uri | http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001907577 | en_US |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/7795 | - |
dc.description | Doctor | en_US |
dc.language | kor | en_US |
dc.publisher | 포항공과대학교 | en_US |
dc.rights | BY_NC_ND | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
dc.title | Metal-alkylamide와 metal-alkoxide 화합물을 사용한 Hf-silicate 박막의 원자층화학증착 및 유기금속화학증착 | en_US |
dc.title.alternative | (Atomic Layer) Chemical Vapor Deposition of Hf-silicate Gate Dielectrics Using a Precursor Combination:Metal Complex of Alkylamido and Alkoxide Groups | en_US |
dc.type | Thesis | en_US |
dc.contributor.college | 일반대학원 화학공학과 | en_US |
dc.date.degree | 2006-02 | en_US |
dc.type.docType | Thesis | - |
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