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dc.contributor.author전치혁-
dc.date.accessioned2018-06-21T08:27:02Z-
dc.date.available2018-06-21T08:27:02Z-
dc.date.created2009-03-27-
dc.date.issued1999-01-17-
dc.identifier.urihttps://oasis.postech.ac.kr/handle/2014.oak/78090-
dc.publisherSMOMS-
dc.relation.isPartOfInt'l Conf on Semiconductor Manufacturing Operational Modeling & Simulation (SMOMS'99)-
dc.relation.isPartOfInt'l Conf on Semiconductor Manufacturing Operational Modeling & Simulation (SMOMS'99)-
dc.titleSemiconductor Yield Models Considering Cluster Effect and Fault Observation-
dc.typeConference-
dc.type.rimsCONF-
dc.identifier.bibliographicCitationInt'l Conf on Semiconductor Manufacturing Operational Modeling & Simulation (SMOMS'99), pp.107 - 112-
dc.citation.conferencePlaceUS-
dc.citation.endPage112-
dc.citation.startPage107-
dc.citation.titleInt'l Conf on Semiconductor Manufacturing Operational Modeling & Simulation (SMOMS'99)-
dc.contributor.affiliatedAuthor전치혁-
dc.description.journalClass1-
dc.description.journalClass1-

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전치혁JUN, CHI HYUCK
Dept of Industrial & Management Enginrg
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