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Development of Silicon Microcapacitive Accelerometer for Seismic Measurement

Title
Development of Silicon Microcapacitive Accelerometer for Seismic Measurement
Authors
임근배
Date Issued
1999-01-01
Publisher
SPIE
URI
https://oasis.postech.ac.kr/handle/2014.oak/78113
Article Type
Conference
Citation
Proceedings of SPIE, Subsurface Sensors and Applications, page. 125 - 132, 1999-01-01
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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