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Gas-Source Molecular Beam Epitaxy of Si1-xGex on Si(011): Surface Structure, Growth Kinetics, and Surface Morphology
- Title
- Gas-Source Molecular Beam Epitaxy of Si1-xGex on Si(011): Surface Structure, Growth Kinetics, and Surface Morphology
- Authors
- 김형준
- Date Issued
- 1998-11-01
- Article Type
- Conference
- Citation
- American Vacuum Society, 1998-11-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg