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An XY scanner with minimized coupling motions for the high speed AFM
- Title
- An XY scanner with minimized coupling motions for the high speed AFM
- Authors
- 문원규
- Date Issued
- 2005-05-01
- Publisher
- International conference of the european society for precision engineering and nanotechnology
- Article Type
- Conference
- Citation
- International conference of the european society for precision engineering and nanotechnology, 2005-05-01
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Related Researcher
- 문원규MOON, WON KYU
- Dept of Mechanical Enginrg