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Does line edge roughness matter?: FEOL and BEOL perspectives
- Title
- Does line edge roughness matter?: FEOL and BEOL perspectives
- Authors
- 김형준
- Date Issued
- 2003-06-01
- Publisher
- SPIE
- Article Type
- Conference
- Citation
- Advances in Resist Technology and Processing, page. 1076 - 1085, 2003-06-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg