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2-D Fluid and Kinetic Simulations of Magnetron Sputter and PDP
- Title
- 2-D Fluid and Kinetic Simulations of Magnetron Sputter and PDP
- Authors
- 이재구
- Date Issued
- 1998-05-26
- Publisher
- American Vacuum Soc.
- Article Type
- Conference
- Citation
- Proceed. 4th Intern. Workshop on Advanced Plasma Tools, page. 187, 1998-05-26
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