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A New Cluster Index for Semiconductor Wafer Defects and Simulation-based Yield Prediction Models
- Title
- A New Cluster Index for Semiconductor Wafer Defects and Simulation-based Yield Prediction Models
- Authors
- 전치혁
- Date Issued
- 1997-12-20
- Publisher
- ICC&IE
- Article Type
- Conference
- Citation
- Proceedings of the 22nd ICC&IE, page. 619 - 622, 1997-12-20
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Related Researcher
- 전치혁JUN, CHI HYUCK
- Dept of Industrial & Management Enginrg