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PECVD 증착 변수와 in-situ IR cell을 이용한 온도별 a-Si:H의 특성 변화

Title
PECVD 증착 변수와 in-situ IR cell을 이용한 온도별 a-Si:H의 특성 변화
Authors
이시우
Date Issued
1997-01-01
Publisher
한국진공학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/80632
Article Type
Conference
Citation
제12회 한국진공학회 학술발표회, page. 66, 1997-01-01
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