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Thermally robust dual-work function ALD-MNx MOSFETs using conventional CMOS process flow
- Title
- Thermally robust dual-work function ALD-MNx MOSFETs using conventional CMOS process flow
- Authors
- 김형준
- Date Issued
- 2004-07-01
- Publisher
- IEEE
- Article Type
- Conference
- Citation
- VLSI Tech. Digest, page. 167 - 168, 2004-07-01
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg