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Grazing Incident Small-Angle X-Ray Scattering Studies on Nanoporous Low-k Dielectric Thin Films
- Title
- Grazing Incident Small-Angle X-Ray Scattering Studies on Nanoporous Low-k Dielectric Thin Films
- Authors
- 이문호
- Date Issued
- 2004-06-01
- Publisher
- International Assoc. of X-Ray and Neutron Scattering, Bad Honnef, Germany
- Article Type
- Conference
- Citation
- 8th International Conference on Surface X-Ray and Neutron Scattering, 2004-06-01
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry