Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Analysis of Charge-up Effects in CCPs and Chargeup-Free Neutral Beam Etching by PIC Simulation
- Title
- Analysis of Charge-up Effects in CCPs and Chargeup-Free Neutral Beam Etching by PIC Simulation
- Authors
- 이재구
- Date Issued
- 2004-06-01
- Article Type
- Conference
- Citation
- 7th Asia Pacific Conference on Plasma Science and Technology(APCPST), 2004-06-01
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.