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Metalorganic Chemical Vapor Deposition of ZrO2 and TiO2 using Zr(dmae)4 and Ti(dmae)4
- Title
- Metalorganic Chemical Vapor Deposition of ZrO2 and TiO2 using Zr(dmae)4 and Ti(dmae)4
- Authors
- 용기중
- Date Issued
- 2001-05-01
- Publisher
- KIChE
- Article Type
- Conference
- Citation
- The Second Asian Conference on Chemical Vapor Deposition, page. 200 - 200, 2001-05-01
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg