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그리드 전극계를 이용한 ECR 플라즈마 이온빔의 특성연구

Title
그리드 전극계를 이용한 ECR 플라즈마 이온빔의 특성연구
Authors
양정미
Date Issued
2006
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001907900
https://oasis.postech.ac.kr/handle/2014.oak/8117
Article Type
Thesis
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