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RuO2박막과 RuO2/Ru 이중막의 산소분위기 열처리시 표면반응 연구
- Title
- RuO2박막과 RuO2/Ru 이중막의 산소분위기 열처리시 표면반응 연구
- Authors
- 박찬경
- Date Issued
- 1997-10-01
- Publisher
- 성균관대
- Article Type
- Conference
- Citation
- 한국재료학회 추계학술대회, 1997-10-01
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg