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PIC 시뮬레이션을 이용한 CCP장비에서의 CF4 discharge 특성 연구
- Title
- PIC 시뮬레이션을 이용한 CCP장비에서의 CF4 discharge 특성 연구
- Authors
- 강종혁
- Date Issued
- 2007
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001908034
https://oasis.postech.ac.kr/handle/2014.oak/8251
- Article Type
- Thesis
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