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Rf Magnetron Sputtering으로 증착된 RuO2박막의 미세구조 및 계면반응 특성 분석
- Title
- Rf Magnetron Sputtering으로 증착된 RuO2박막의 미세구조 및 계면반응 특성 분석
- Authors
- 박찬경
- Date Issued
- 1996-11-01
- Publisher
- 한국재료학회
- Article Type
- Conference
- Citation
- 한국재료학회 추계발표회 개요집, page. 52, 1996-11-01
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg