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Simulation of Czochralski process for silicon single crystal production
- Title
- Simulation of Czochralski process for silicon single crystal production
- Authors
- 강인석
- Date Issued
- 1996-01-01
- Publisher
- ICL Workshop on Simulation, Optimization, and Control in Process Engineering
- Article Type
- Conference
- Citation
- ICL Workshop on Simulation, Optimization, and Control in Process Engineering, 1996-01-01
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Related Researcher
- 강인석KANG, IN SEOK
- Dept. of Chemical Enginrg