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Low temperature CMOS thin-film transistors in RTCVD poly-Si0.88Ge0.12 films

Title
Low temperature CMOS thin-film transistors in RTCVD poly-Si0.88Ge0.12 films
Authors
강봉구
Date Issued
1996-01-01
Publisher
Int. Conf. on Solid State Devices and Materials
URI
https://oasis.postech.ac.kr/handle/2014.oak/82662
Article Type
Conference
Citation
Int. Conf. on Solid State Devices and Materials, page. 335, 1996-01-01
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강봉구KANG, BONG KOO
Dept of Electrical Enginrg
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