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Creation of extreme high vacuum with a turbomolecular pumping system: A baking approch

Title
Creation of extreme high vacuum with a turbomolecular pumping system: A baking approch
Authors
정석민
Date Issued
1995-09-01
URI
https://oasis.postech.ac.kr/handle/2014.oak/82834
Article Type
Conference
Citation
13th Int. Vac. Cong., Yokohama and '95 XHV Workshop, 1995-09-01
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