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Fabrication and bond characteristics of slow-ion deposited SiO2 films

Title
Fabrication and bond characteristics of slow-ion deposited SiO2 films
Authors
정진욱
Date Issued
1992-10-01
Publisher
한국물리학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/83514
Article Type
Conference
Citation
Proceedings of the 14th solid state physics symposium, page. 74, 1992-10-01
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