Remote PECVD와 Direct PECVD에 의해 증착된 실리콘 산화막의 특성평가
- Title
- Remote PECVD와 Direct PECVD에 의해 증착된 실리콘 산화막의 특성평가
- Authors
- 강봉구
- Date Issued
- 1991-01-01
- Publisher
- 전자공학회
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/83640
- Article Type
- Conference
- Citation
- 91 전자공학외 추계 학술대회, page. 295, 1991-01-01
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- There are no files associated with this item.
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