Epitaxial CoSi2 Growth from PE-ALD Co Films through Nitride-Mediated Epitaxy
- Title
- Epitaxial CoSi2 Growth from PE-ALD Co Films through Nitride-Mediated Epitaxy
- Authors
- 김형준
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/83734
- Article Type
- Conference
- Citation
- MRS 2007 Spring Meeting
- Files in This Item:
- There are no files associated with this item.
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