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Control of carrier concentration of ZnO thin film prepared by ALD: application for active layer thin film transistor

Title
Control of carrier concentration of ZnO thin film prepared by ALD: application for active layer thin film transistor
Authors
김형준
Publisher
AVS
URI
https://oasis.postech.ac.kr/handle/2014.oak/83760
Article Type
Conference
Citation
Joint Symposium on Hatenals ccience & Engneering for the 21st Century(2006)
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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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