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Atomic Layer Deposition of Ta-Based Thin Films form Alkylamide Precursors with Various Reactants
- Title
- Atomic Layer Deposition of Ta-Based Thin Films form Alkylamide Precursors with Various Reactants
- Authors
- 김형준
- Publisher
- AVS
- Article Type
- Conference
- Citation
- ALD 2006
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg