Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Comparative Study on TaN and Ta2O5 Plasma Enhanced Atomic Layer Deposition from Alkylamide Precursor
- Title
- Comparative Study on TaN and Ta2O5 Plasma Enhanced Atomic Layer Deposition from Alkylamide Precursor
- Authors
- 김형준
- Publisher
- 창원
- Article Type
- Conference
- Citation
- 2006년 금속 재료학회
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg