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Control of Electrical Properties of Atomic Layer Deposition ZnO active Layer for Thin Film Transistor: in-situ Nitrogen Doping and Post-deposition UV Treatments
- Title
- Control of Electrical Properties of Atomic Layer Deposition ZnO active Layer for Thin Film Transistor: in-situ Nitrogen Doping and Post-deposition UV Treatments
- Authors
- 김형준
- Publisher
- American Vacuum Society
- Article Type
- Conference
- Citation
- AVS 55th International Symposium & Exhibition
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg