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Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films on Ta2O5 Substrate
- Title
- Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films on Ta2O5 Substrate
- Authors
- 김형준
- Article Type
- Conference
- Citation
- ADMETA 2008
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg