Full metadata record
DC Field | Value | Language |
dc.contributor.author | 김형준 | - |
dc.date.accessioned | 2018-06-21T15:04:46Z | - |
dc.date.available | 2018-06-21T15:04:46Z | - |
dc.date.created | 2009-03-27 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/83917 | - |
dc.publisher | VMIC conference proceeding | - |
dc.relation.isPartOf | VMIC conference proceeding | - |
dc.relation.isPartOf | VMIC conference proceeding | - |
dc.title | Atomic Layer Deposition for Nanoscale Contact Application | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | VMIC conference proceeding, pp.309 | - |
dc.citation.conferenceDate | 2008-10-01 | - |
dc.citation.startPage | 309 | - |
dc.citation.title | VMIC conference proceeding | - |
dc.contributor.affiliatedAuthor | 김형준 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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