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Synchrotron X-ray Scattering Study on the Initial Growth of Atomic Layer Deposition Thin Films for the Next Generation MOSFET
- Title
- Synchrotron X-ray Scattering Study on the Initial Growth of Atomic Layer Deposition Thin Films for the Next Generation MOSFET
- Authors
- 김형준
- Article Type
- Conference
- Citation
- Electroceramics XI
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg