Nanostructure Fabrication through Selective Epitaxial Growth of SiGe on the Self-Assembled Nanotemplates Using Ultrahigh Vacuum Chemical Vapor Deposition
- Title
- Nanostructure Fabrication through Selective Epitaxial Growth of SiGe on the Self-Assembled Nanotemplates Using Ultrahigh Vacuum Chemical Vapor Deposition
- Authors
- 김형준
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/83925
- Article Type
- Conference
- Citation
- Joint Symposium on Material Science and Engineering for the 21th Century
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