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새로운 고정밀 대변위 전기용량형 변위센서

Title
새로운 고정밀 대변위 전기용량형 변위센서
Authors
문원규
Publisher
MEMS
URI
https://oasis.postech.ac.kr/handle/2014.oak/83985
Article Type
Conference
Citation
제8회 한국 MEMS 학술대회, page. 394 - 397
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문원규MOON, WON KYU
Dept of Mechanical Enginrg
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