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Electrical Characteristics of solenoidal inductively coupled plasma discharge

Title
Electrical Characteristics of solenoidal inductively coupled plasma discharge
Authors
유창모
Date Issued
1997-11-01
Publisher
한국물리학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/84592
Article Type
Conference
Citation
한국물리학회, 1997-11-01
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