Imprinting well-controlled closed-nanopores in spin-on polymeric dielectric thin films with using six-armed star shape porogens
- Title
- Imprinting well-controlled closed-nanopores in spin-on polymeric dielectric thin films with using six-armed star shape porogens
- Authors
- 이문호
- Publisher
- HASYLAB/DESY, Notkestr. 85, D-22607
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/85809
- Article Type
- Conference
- Citation
- 2nd Workshop “GISAXS - An Advanced Scattering Method”
- Files in This Item:
- There are no files associated with this item.
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