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Thermal stability of Ru based oxide thin films in oxygen atmosphere
- Title
- Thermal stability of Ru based oxide thin films in oxygen atmosphere
- Authors
- 박찬경
- Date Issued
- 1999-01-01
- Article Type
- Conference
- Citation
- The 6th Korean Conference on Semiconductors, page. 479, 1999-01-01
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg