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Analytical Study on Initial Growth Stage of Metal Atomic Layer Deposition By Synchrotron Radiation X-Ray Reflectivity Analysis
- Title
- Analytical Study on Initial Growth Stage of Metal Atomic Layer Deposition By Synchrotron Radiation X-Ray Reflectivity Analysis
- Authors
- 김형준
- Publisher
- Boston, USA
- Article Type
- Conference
- Citation
- MRS 2007 Fall Meeting
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg