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Atomic Layer Deposition of Metal Films for Contact Applications of Nanoscale Devices
- Title
- Atomic Layer Deposition of Metal Films for Contact Applications of Nanoscale Devices
- Authors
- 김형준
- Publisher
- ADMETA
- Article Type
- Conference
- Citation
- ADMETA 2007
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg