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STEM-HAADF analysis of high quality epitaxial CoSi2 grown on Si(001) by using plasma nitridation-mediated epitaxy
- Title
- STEM-HAADF analysis of high quality epitaxial CoSi2 grown on Si(001) by using plasma nitridation-mediated epitaxy
- Authors
- 김형준
- Article Type
- Conference
- Citation
- The 11th Frontiers of Electron Microscopy in Materials Science Conference 2007
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg