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Imprinting Well Controlled Nanopores in Organosilicate Dielectric Films
- Title
- Imprinting Well Controlled Nanopores in Organosilicate Dielectric Films
- Authors
- 이문호
- Article Type
- Conference
- Citation
- 3rd International Symposium of X-ray and Neutron Scattering on Integrated Molecular Systems
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry