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Chracterization of of High-k Dielectric Al2O3 Thin Film on Silicon Using Synchrotron X-ray Reflectivity
- Title
- Chracterization of of High-k Dielectric Al2O3 Thin Film on Silicon Using Synchrotron X-ray Reflectivity
- Authors
- 이문호
- Article Type
- Conference
- Citation
- 2005 Annual Meeting of Korean Analytical Science
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry