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A rule-based recognition of spatial defect patterns on semiconductor wafers
- Title
- A rule-based recognition of spatial defect patterns on semiconductor wafers
- Authors
- 전치혁
- Publisher
- APIEMS
- Article Type
- Conference
- Citation
- Proceedings of the 7th APIEMS Conference, page. 1304 - 1310
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Related Researcher
- 전치혁JUN, CHI HYUCK
- Dept of Industrial & Management Enginrg