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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박현철 | - |
| dc.date.accessioned | 2018-06-22T05:31:46Z | - |
| dc.date.available | 2018-06-22T05:31:46Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/88599 | - |
| dc.publisher | SPIE | - |
| dc.relation.isPartOf | SPIE Microelectronics, MEMS and Nanotechnology | - |
| dc.relation.isPartOf | SPIE Microelectronics, MEMS and Nanotechnology | - |
| dc.title | Mechanical properties measurement of siliconnitride thin films using the bulge test | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | SPIE Microelectronics, MEMS and Nanotechnology | - |
| dc.citation.conferenceDate | 2007-12-04 | - |
| dc.citation.title | SPIE Microelectronics, MEMS and Nanotechnology | - |
| dc.contributor.affiliatedAuthor | 박현철 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
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