Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Comparative study on TaN and Ta2O5 plasma enhanced atomic layer deposition from alkylamide precursor
- Title
- Comparative study on TaN and Ta2O5 plasma enhanced atomic layer deposition from alkylamide precursor
- Authors
- 박찬경
- Publisher
- ALD 2006
- Article Type
- Conference
- Citation
- ALD 2006
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg