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In-situ diagnosis of hafnium and tantalum precursors using Fourier transform infrared (FT-IR) spectroscopy
- Title
- In-situ diagnosis of hafnium and tantalum precursors using Fourier transform infrared (FT-IR) spectroscopy
- Authors
- 이시우
- Publisher
- American Vacuum Society
- Article Type
- Conference
- Citation
- AVS 7th International Conference on Atomic Layer Deposition, page. 130
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