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In-situ diagnosis using FT-IR spectroscopy and the characterization of Hf nitride films
- Title
- In-situ diagnosis using FT-IR spectroscopy and the characterization of Hf nitride films
- Authors
- 이시우
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- IUVSTA ECM-100 special symposium
- Article Type
- Conference
- Citation
- IUVSTA ECM-100 special symposium
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